In Vacuum Type/Full Automatic Type
Crystal & SAW, Optical device, Sensor
Features
- Fastest Cycle Time 1.5s & High Availability
- Minimum PKG Size 2016
- High reliability sealing
- High Performance Sealing Head & PS
- Easy Maintenance & Product Shift
| In Vacuum Type/Full Automatic Type | |
|---|---|
| Power Source:Main Body | AC200V 3Φ 40A |
| Power Source:Chamber | AC200V 3Φ 30A |
| Air | 0.5 MPa |
| N2 Gas | 0.2 MPa |
| Water | 0.5 MPa |
| Dimensions / Mass | 3950W x 1320D x 1870H mm 2,045kg |